tag:blogger.com,1999:blog-37276666935476751302024-03-04T23:02:29.219-08:00SNF Safety IncidentsUnknownnoreply@blogger.comBlogger7125tag:blogger.com,1999:blog-3727666693547675130.post-58896700324604354832013-08-16T16:30:00.001-07:002013-08-16T16:30:22.984-07:00Fwd: [labmembers] Fire Alarm Cleared-------- Original Message -------- <div class="moz-forward-container"> <table class="moz-email-headers-table" border="0" cellpadding="0" cellspacing="0"> <tbody> <tr> <th align="RIGHT" nowrap="nowrap" valign="BASELINE">Subject: </th> <td>[labmembers] Fire Alarm Cleared</td> </tr> <tr> <th align="RIGHT" nowrap="nowrap" valign="BASELINE">Date: </th> <td>Fri, 16 Aug 2013 01:24:19 -0700</td> </tr> <tr> <th align="RIGHT" nowrap="nowrap" valign="BASELINE">From: </th> <td>Mary Tang <a class="moz-txt-link-rfc2396E" href="mailto:mtang@stanford.edu"><mtang@stanford.edu></a></td> </tr> <tr> <th align="RIGHT" nowrap="nowrap" valign="BASELINE">To: </th> <td><a class="moz-txt-link-abbreviated" href="mailto:labmembers@snf.stanford.edu">labmembers@snf.stanford.edu</a></td> </tr> </tbody> </table> <br> <br> <pre>Dear labmembers -- Around 10:45 pm Thursday evening, the general building fire alarm went off. (And I understand everyone evacuated the lab and building as you were trained - thank you!) The Palo Alto Fire department responded, but found no emergency situation. So, they reset the alarm and cleared the building for re-entry. It is not clear yet exactly what happened, but appears not to involve the lab and we were assured the building was safe. When a fire alarm goes off for any reason, for safety reasons, all toxic gases automatically shut off. With a few exceptions, these have been reset (please check Badger for those exceptions.) Also, until about 1 am, there was little or no oxygen or hydrogen flow -- so if you were using a system requiring either of these gases between 10:45 pm - 1 am, please check your wafers before continuing to process. And if you encounter a machine problem, please note on badger. Apologies for the inconvenience. The maintenance crew will be in bright and early to clean things up. Mary -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility Paul G. Allen Bldg 141, Mail Code 4070 Stanford, CA 94305 (650)723-9980 <a class="moz-txt-link-abbreviated" href="mailto:mtang@stanford.edu">mtang@stanford.edu</a> <a class="moz-txt-link-freetext" href="http://snf.stanford.edu">http://snf.stanford.edu</a> _______________________________________________ labmembers mailing list <a class="moz-txt-link-abbreviated" href="mailto:labmembers@snf.stanford.edu">labmembers@snf.stanford.edu</a> <a class="moz-txt-link-freetext" href="http://snf.stanford.edu/mailman/listinfo/labmembers">http://snf.stanford.edu/mailman/listinfo/labmembers</a> </pre> <br> </div> <br> Unknownnoreply@blogger.com1tag:blogger.com,1999:blog-3727666693547675130.post-5926320921997707712013-08-01T10:03:00.000-07:002013-08-01T10:09:24.210-07:00Fire Alarms in the Paul Allen/Annex BuildingsThis morning, around 3:30 am, there was a fire alarm in the Annex. This
<br>was caused by burning food in a microwave. For safety purposes, any
<br>fire alarm will shut off all process gases to the building, the Annex
<br>labs as well as the cleanroom. Staff responded and were in the process
<br>of resetting process gases when another fire alarm went off shortly
<br>before 6 am. This was for hydrogen sensors which were triggered by blow
<br>off following a liquid hydrogen delivery this morning. The Fire
<br>Department responded and reset the alarms. The maintenance staff has
<br>now reset the gases.
<br>
<br> From about 3:30 this morning until around 6:30 or so, there were no
<br>process gases, including hydrogen and oxygen. If you were running any
<br>processes during this time requiring any hydrogen, oxygen, or hazardous
<br>gases, it is likely your material is affected. Please check your
<br>experiments carefully before continuing with your process. Feel free to
<br>consult with staff members about any questions.
<br>
<br>Our apologies for the inconvenience. We continue to work with our
<br>supplier on resolving the hydrogen blow off issue.
<br>
<br>Your SNF Staff
<br>
<br>--
<br>Mary X. Tang, Ph.D.
<br>Stanford Nanofabrication Facility
<br>Paul G. Allen Bldg 141, Mail Code 4070
<br>Stanford, CA 94305
<br>(650)723-9980
<br><a href="mailto:mtang@stanford.edu">mtang@stanford.edu</a>
<br><a href="http://snf.stanford.edu">http://snf.stanford.edu</a>Unknownnoreply@blogger.com0tag:blogger.com,1999:blog-3727666693547675130.post-6794874224109421682013-07-22T11:35:00.002-07:002013-07-22T11:48:43.593-07:00Random Tool Faults/Errors Sunday, 7/21Several lab tools experienced faults and errors starting just before 3 am Sunday morning. The maintenance crew were able to trace this back to a liquid nitrogen tank delivery which seems to have caused a drop in nitrogen supply pressure. This, in turn, caused many subsystems to fail (burn boxes, gas cabinets, building oxygen.) Some systems reset themselves, but others did not. We are working with Air Products, our LN2 supplier, to determine why this happened and what needs to be done to ensure this doesn't happen again.<br />
<br />
Our sincere apologies to those whose processing or equipment access was affected by this incident.<br />
<br />
Below is Ted's graph of gage reading for the nitrogen supply (node #9), oxygen (node #11), and ultra-high purity nitrogen (node #13). The high purity N2 was only slightly affected. The oxygen is affected because the main pneumatic valve is supplied by utility nitrogen.<br />
<br />
<div class="separator" style="clear: both; text-align: center;">
<a href="https://blogger.googleusercontent.com/img/b/R29vZ2xl/AVvXsEh0sqDMnYpZ4R13k4kTyDtT0OhZeOuDY54dwksC0xS2PK_88TIpmrvjEuYNbMd14Lv68OgF96Kj_1nOdiUffjlPwmYwAjuTxgFWCxvdyVGo-8Klg5Nb5CFRNSng7uqgCTS8_9PvSv_ZbAo/s1600/WGR.JPG" imageanchor="1" style="margin-left: 1em; margin-right: 1em;"><img bba="true" border="0" height="480" src="https://blogger.googleusercontent.com/img/b/R29vZ2xl/AVvXsEh0sqDMnYpZ4R13k4kTyDtT0OhZeOuDY54dwksC0xS2PK_88TIpmrvjEuYNbMd14Lv68OgF96Kj_1nOdiUffjlPwmYwAjuTxgFWCxvdyVGo-8Klg5Nb5CFRNSng7uqgCTS8_9PvSv_ZbAo/s640/WGR.JPG" width="640" /></a></div>
<div class="separator" style="clear: both; text-align: center;">
</div>
Unknownnoreply@blogger.com0tag:blogger.com,1999:blog-3727666693547675130.post-43259199698049553432013-07-16T12:15:00.000-07:002013-07-16T12:16:02.187-07:00Silane TGO alarm activated during cylinder change_______________________________________________
<br>snf-irteam mailing list
<br><a href="mailto:snf-irteam@lists.stanford.edu">snf-irteam@lists.stanford.edu</a>
<br><a href="https://mailman.stanford.edu/mailman/listinfo/snf-irteam">https://mailman.stanford.edu/mailman/listinfo/snf-irteam</a>
<br>
<br>-------- Original Message -------- <div class="moz-forward-container"> <table class="moz-email-headers-table" border="0" cellpadding="0" cellspacing="0"> <tbody> <tr> <th valign="BASELINE" align="RIGHT" nowrap="nowrap">Subject: </th> <td>[snf-irteam] IRT update</td> </tr> <tr> <th valign="BASELINE" align="RIGHT" nowrap="nowrap">Date: </th> <td>Tue, 16 Jul 2013 11:59:51 -0700</td> </tr> <tr> <th valign="BASELINE" align="RIGHT" nowrap="nowrap">From: </th> <td>Ted Berg <a class="moz-txt-link-rfc2396E" href="mailto:tberg@stanford.edu"><tberg@stanford.edu></a></td> </tr> <tr> <th valign="BASELINE" align="RIGHT" nowrap="nowrap">To: </th> <td><a class="moz-txt-link-abbreviated" href="mailto:snf-irteam@lists.stanford.edu">snf-irteam@lists.stanford.edu</a></td> </tr> </tbody> </table> <br> <br> <meta http-equiv="content-type" content="text/html; charset=ISO-8859-1"> Hello All,<br> just a quick update on our incident this morning. At approximately 9:10 am, two of our staff were changing a 5% silane cylinder believed to be empty. When the high pressure vent was opened the TGO sensor was triggered. The alarms were silenced and acknowledged. As it turns out the cylinder was not empty it was a malfunction of a solenoid in the controller that had been shut down on Saturday and did not respond to the reset and thus the line was drained.Once the solenoid was activated bottle pressure came up to normal. <br> In the process of trouble shooting this issue we discovered that the burn box for the gas panel vents was malfunctioning so we are shutting it down to troubleshoot. That means<i><b> No Cylinder changes in 115X until burn box is resolved</b></i>. Ted<br> <br> </div> <br> Unknownnoreply@blogger.com1tag:blogger.com,1999:blog-3727666693547675130.post-2483196009967374862013-07-14T10:52:00.001-07:002013-07-14T10:52:23.272-07:00Fire alarm triggered by P5000 on 7/13/13 Update<span style="background-color: white; font-family: monospace;">Hi all --</span><br />
<br style="font-family: monospace;" />
<span style="background-color: white; font-family: monospace;">There was a fire alarm </span><span class="Object" id="OBJ_PREFIX_DWT112_com_zimbra_date" style="color: darkblue; cursor: pointer; font-family: monospace;">this morning</span><span style="background-color: white; font-family: monospace;">. The Fire Department responded and</span><span style="background-color: white; font-family: monospace;"> </span><br />
<span style="background-color: white; font-family: monospace;">were met by SNF staff. The problem was a heat exchanger in the</span><span style="background-color: white; font-family: monospace;"> </span><br />
<span style="background-color: white; font-family: monospace;">basement, which overheated - the steam set off the smoke detectors. The</span><span style="background-color: white; font-family: monospace;"> </span><br />
<span style="background-color: white; font-family: monospace;">alarm has been cleared and the building is OK to reoccupy. Apologies for</span><span style="background-color: white; font-family: monospace;"> </span><br />
<span style="background-color: white; font-family: monospace;">any inconvenience.</span><br />
<br style="font-family: monospace;" />
<span style="background-color: white; font-family: monospace;">Your SNF Staff</span>Unknownnoreply@blogger.com2tag:blogger.com,1999:blog-3727666693547675130.post-30579999115666067302013-07-14T10:46:00.000-07:002013-07-14T10:46:09.521-07:00Fire alarm triggered by P5000 heat xchanger on 7/13/13<span style="background-color: white; font-family: monospace;">Update from Jim & Cesar:</span><br />
<br style="font-family: monospace;" />
<span style="background-color: white; font-family: monospace;">-Fire alarm was cleared.</span><br />
<span style="background-color: white; font-family: monospace;">-It was the p5000etch heat exchanger line that blew, so this is down now.</span><br />
<span style="background-color: white; font-family: monospace;">-The gases have been reset, except for the new HBr which seems to have</span><span style="background-color: white; font-family: monospace;"> </span><br />
<span style="background-color: white; font-family: monospace;">an exhaust error.</span><br />
<span style="background-color: white; font-family: monospace;">-Oxygen has been a problem to reset. Jim tried 3 times before the</span><span style="background-color: white; font-family: monospace;"> </span><br />
<span style="background-color: white; font-family: monospace;">excess flow switch stayed open. It might be worth asking Air Products</span><span style="background-color: white; font-family: monospace;"> </span><br />
<span style="background-color: white; font-family: monospace;">about this.</span><br />
<span style="background-color: white; font-family: monospace;">-Lab activities were very light (probably because the ASML is down.)</span><br />
<br style="font-family: monospace;" />
<span class="Object" id="OBJ_PREFIX_DWT120_com_zimbra_date" style="color: darkblue; cursor: pointer; font-family: monospace;">Monday</span><span style="background-color: white; font-family: monospace;"> </span><span style="background-color: white; font-family: monospace;">morning, we'll do a run through of what happened and any follow</span><span style="background-color: white; font-family: monospace;"> </span><br />
<span style="background-color: white; font-family: monospace;">up tasks in our lab update meeting. Many thanks to Jim and Cesar for</span><span style="background-color: white; font-family: monospace;"> </span><br />
<span style="background-color: white; font-family: monospace;">taking care of things on the scene and John for coaching.</span><br />
<br style="font-family: monospace;" />
<span style="background-color: white; font-family: monospace;">Mary</span>Unknownnoreply@blogger.com0tag:blogger.com,1999:blog-3727666693547675130.post-54826314421266728252013-07-14T10:42:00.003-07:002013-07-17T16:40:46.301-07:00Xylene bottle breakage in Litho Area on 6/17/13<span style="background-color: white; font-family: Arial;">Hi IRT members and All</span><br />
<br style="background-color: white; font-family: Arial; font-size: 13.333333015441895px;" />
<span style="background-color: white; font-family: Arial; font-size: 13.333333015441895px;"> </span><span style="background-color: white; font-family: Arial;"> </span><span style="background-color: white; font-family: Arial;">Late this evening there was a chemical release at the Ebeam bench in the Litho area between 11:00PM and 12:00AM. A user, Takashi Kodana dropped a glass bottle of Xylenes on the floor. The bottle, which broke contained less than a liter of material. The user did an initial cleanup of the release and then called the duty phone at 12:04AM. I instructed the user to evacuate the Litho area and to keep any users out of the area until I arrived. When I arrived, the user had the Litho area secured with yellow caution tape at both entrances. The Litho area still had a strong odor at that time. I did a quick assessment of the situation with Takashi and did a final cleanup of the chemical which was trapped under some secondary containment pans( using a respirator). I allowed the room to air out and as of 3:00AM the odor had dissipated. Removed the caution tape from the Litho doors and tagged all hazardous waste bags. I thanked Takashi for his help and also insured him that it would have been OK to not clean up the spill and evacuate the area immediately for health and safety reasons, and then call for help.</span><br style="background-color: white; font-family: Arial;" /><br style="background-color: white; font-family: Arial;" /><span style="background-color: white; font-family: Arial;"> </span><span style="background-color: white; font-family: Arial;">... Gary</span>Unknownnoreply@blogger.com1