Monday, July 22, 2013

Random Tool Faults/Errors Sunday, 7/21

Several lab tools experienced faults and errors starting just before 3 am Sunday morning.  The maintenance crew were able to trace this back to a liquid nitrogen tank delivery which seems to have caused a drop in nitrogen supply pressure.  This, in turn, caused many subsystems to fail (burn boxes, gas cabinets, building oxygen.)  Some systems reset themselves, but others did not.  We are working with Air Products, our LN2 supplier, to determine why this happened and what needs to be done to ensure this doesn't happen again.

Our sincere apologies to those whose processing or equipment access was affected by this incident.

Below is Ted's graph of gage reading for the nitrogen supply (node #9), oxygen (node #11), and ultra-high purity nitrogen (node #13).  The high purity N2 was only slightly affected.  The oxygen is affected because the main pneumatic valve is supplied by utility nitrogen.

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