Friday, August 16, 2013

Fwd: [labmembers] Fire Alarm Cleared

-------- Original Message --------
Subject: [labmembers] Fire Alarm Cleared
Date: Fri, 16 Aug 2013 01:24:19 -0700
From: Mary Tang <>

Dear labmembers --    Around 10:45 pm Thursday evening, the general building fire alarm went   off.  (And I understand everyone evacuated the lab and building as you   were trained - thank you!)  The Palo Alto Fire department responded, but   found no emergency situation.  So, they reset the alarm and cleared the   building for re-entry.  It is not clear yet exactly what happened, but   appears not to involve the lab and we were assured the building was safe.    When a fire alarm goes off for any reason, for safety reasons, all toxic   gases automatically shut off.  With a few exceptions, these have been   reset (please check Badger for those exceptions.)  Also, until about 1   am, there was little or no oxygen or hydrogen flow -- so if you were   using a system requiring either of these gases between 10:45 pm - 1 am,   please check your wafers before continuing to process.  And if you   encounter a machine problem, please note on badger.    Apologies for the inconvenience.  The maintenance crew will be in bright   and early to clean things up.    Mary    --   Mary X. Tang, Ph.D.  Stanford Nanofabrication Facility  Paul G. Allen Bldg 141, Mail Code 4070  Stanford, CA  94305  (650)723-9980    _______________________________________________  labmembers mailing list  

Thursday, August 1, 2013

Fire Alarms in the Paul Allen/Annex Buildings

This morning, around 3:30 am, there was a fire alarm in the Annex. This
was caused by burning food in a microwave. For safety purposes, any
fire alarm will shut off all process gases to the building, the Annex
labs as well as the cleanroom. Staff responded and were in the process
of resetting process gases when another fire alarm went off shortly
before 6 am. This was for hydrogen sensors which were triggered by blow
off following a liquid hydrogen delivery this morning. The Fire
Department responded and reset the alarms. The maintenance staff has
now reset the gases.

From about 3:30 this morning until around 6:30 or so, there were no
process gases, including hydrogen and oxygen. If you were running any
processes during this time requiring any hydrogen, oxygen, or hazardous
gases, it is likely your material is affected. Please check your
experiments carefully before continuing with your process. Feel free to
consult with staff members about any questions.

Our apologies for the inconvenience. We continue to work with our
supplier on resolving the hydrogen blow off issue.

Your SNF Staff

Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
Paul G. Allen Bldg 141, Mail Code 4070
Stanford, CA 94305

Monday, July 22, 2013

Random Tool Faults/Errors Sunday, 7/21

Several lab tools experienced faults and errors starting just before 3 am Sunday morning.  The maintenance crew were able to trace this back to a liquid nitrogen tank delivery which seems to have caused a drop in nitrogen supply pressure.  This, in turn, caused many subsystems to fail (burn boxes, gas cabinets, building oxygen.)  Some systems reset themselves, but others did not.  We are working with Air Products, our LN2 supplier, to determine why this happened and what needs to be done to ensure this doesn't happen again.

Our sincere apologies to those whose processing or equipment access was affected by this incident.

Below is Ted's graph of gage reading for the nitrogen supply (node #9), oxygen (node #11), and ultra-high purity nitrogen (node #13).  The high purity N2 was only slightly affected.  The oxygen is affected because the main pneumatic valve is supplied by utility nitrogen.

Tuesday, July 16, 2013

Silane TGO alarm activated during cylinder change

snf-irteam mailing list

-------- Original Message --------
Subject: [snf-irteam] IRT update
Date: Tue, 16 Jul 2013 11:59:51 -0700
From: Ted Berg <>

Hello All,
    just a quick update on our incident this morning. At approximately 9:10 am, two of our staff were changing a 5% silane cylinder believed to be empty. When the high pressure vent was opened the TGO sensor was triggered. The alarms were silenced and acknowledged. As it turns out the cylinder was not empty it was a malfunction of a solenoid in the controller that had been shut down on Saturday and did not respond to the reset and thus the line was drained.Once the solenoid was activated bottle pressure came up to normal.
    In the process of trouble shooting this issue we discovered that the burn box for the gas panel vents was malfunctioning so we are shutting it down to troubleshoot. That means No Cylinder changes in 115X until burn box is resolved. Ted

Sunday, July 14, 2013

Fire alarm triggered by P5000 on 7/13/13 Update

Hi all --

There was a fire alarm this morning.  The Fire Department responded and 
were met by SNF staff.  The problem was a heat exchanger in the 
basement, which overheated - the steam set off the smoke detectors. The 
alarm has been cleared and the building is OK to reoccupy. Apologies for 
any inconvenience.

Your SNF Staff

Fire alarm triggered by P5000 heat xchanger on 7/13/13

Update from Jim & Cesar:

-Fire alarm was cleared.
-It was the p5000etch heat exchanger line that blew, so this is down now.
-The gases have been reset, except for the new HBr which seems to have 
an exhaust error.
-Oxygen has been a problem to reset.  Jim tried 3 times before the 
excess flow switch stayed open.  It might be worth asking Air Products 
about this.
-Lab activities were very light (probably because the ASML is down.)

Monday morning, we'll do a run through of what happened and any follow 
up tasks in our lab update meeting.  Many thanks to Jim and Cesar for 
taking care of things on the scene and John for coaching.


Xylene bottle breakage in Litho Area on 6/17/13

Hi IRT members and All

    Late this evening there was a chemical release at the Ebeam bench in the Litho area between 11:00PM and 12:00AM. A user, Takashi Kodana dropped a glass bottle of Xylenes on the floor. The bottle, which broke contained less than a liter of material. The user did an initial cleanup of the release and then called the duty phone at 12:04AM. I instructed the user to evacuate the Litho area and to keep any users out of the area until I arrived. When I arrived, the user had the Litho area secured with yellow caution tape at both entrances. The Litho area still had a strong odor at that time.  I did a quick assessment of the situation with Takashi and did a final cleanup of the chemical which was trapped under some secondary containment pans( using a respirator). I allowed the room to air out and as of 3:00AM the odor had dissipated. Removed the caution tape from the Litho doors and tagged all hazardous waste bags. I thanked Takashi for his help and also insured  him that it would have been OK to not clean up the spill and evacuate the area immediately for health and safety reasons, and then call for help.

         ... Gary